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E3TAM

Reading identification codes on wafers

Solution concept

A robot presents the wafer edge to a fixed reader. Different lighting directions are tried in sequence; the edge mark is matched to the carrier label and the identity is sent to the record.

edge markmultiple lighting modesidentity matching
Information delivered

Read identity and carrier match are sent to the traceability record. For an unreadable wafer the robot waits for handling permission; the display shows the failed reading region.

Reading identification codes on wafersILLUSTRATIVE SIMULATION
Reading identification codes on wafers
  1. 01 Pick
  2. 02 Select light
  3. 03 Read
  4. 04 Decide
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The robot picks the wafer with an edge-support gripper.

Lighting mode
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Read characters
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Scenes are illustrative simulations; they are not customer references or performance guarantees.

Need

Wafer coating and tilt change laser-mark contrast. Surface glare in one lighting direction can obscure characters; the carrier label must also match the same identity.

Solution approach

The robot brings the wafer edge into the reader view. Oblique bar lights and reader illumination are used in sequence; rule-based reading uses the image with the clearest character edges. The result is compared with the label on the carrier ring.

Process steps

  1. 01

    Pick

    The robot picks the wafer with an edge-support gripper.

  2. 02

    Select light

    Lighting directions are tried in sequence.

  3. 03

    Read

    Edge characters are compared with the carrier code.

  4. 04

    Decide

    Identity is recorded or handling is held.

Vision system design

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